
The custom design of or built-to-print Fast Steering Mirror (FSM) incorporates a mirror mounted to a flexure support system that is tilted to direct a laser beam or other light source. A set of voice coil actuators or eddy current sensors are used to provide the directional motion for complete precision and low jitter functionality.
The system offers either open-loop and closed-loop operation. For closed-loop operation, integrated high-speed precision sensors are used to provide a complete feedback control system. With its modular design, the FSM allows increased flexibility in mirror substrate choice, aperture size, degrees of tilt and control electronics to meet any mission requirements.
| Clear Aperture | 30mmi | φ30~φ50mm | φ50~φ100mm | >φ100mm | 
| Incident Angle | ≤45” | |||
| Angle Range | ←±25mrad | |||
| Mirror Size | φ60mm | φ90mm | φ150mm | 《φ240mm | 
| Resolution | 2μrad | |||
| Closed-loop Bandwidth | ≥600Hz(@1%travel) | 300Hz(@1%travel ) | 150Hz(@1% travel) | 100Hz(@1%travel) | 
| Stap Responsa | <1.5ms(@1%travel) | <3ms(@1% travel) | <5ms( @1% travel) | 10ms(@1%travel) | 
| Repeatability | 2urad ~5urad | |||
| Working Temperature | -40℃~70℃ | |||
| Storage Temperature | -55℃~85℃ | |||
| Anti-Vibration | GJB 150.16A-2009 | |||
| Anti-impact | GJB 150.18A-2009 |